Skip to content Skip to mainnavigation Skip to footer
HomeResearchReference ProjectsEUV-4-LITHO

EUV-4-LITHO

Spectroscopy and analysis of components for EUV lithography and EUV mask inspection

Subject of research

  • Generation of extreme ultraviolet (EUV) radiation at 13.5 nm wavelength for metrology purposes
  • Development of a measurement method for determining the layer thickness of multilayer mirrors
  • Spectroscopy of EUV sources and EUV multilayer mirrors
  • Investigation of high vacuum conditions and EUV sources

Results

  • Development of an EUV spectrometer
  • Theoretical modeling of a measurement method for EUV multilayer systems
  • Measurement of EUV multilayer mirrors

Involved institutions and contact details

Schmalkalden University of Applied Sciences
Faculty of Mechanical Engineering
Physics and Applied Laser Technology
Prof. Dr. Christian Rödel
E-Mail: c.roedel(at)hs-sm.de 
Phone: 03683 688 2101

Military University of Warsaw
Institute of Optoelectronics
Prof. Dr. Henryk Fiedorowicz

Physikalisch-Technische Bundesanstalt
EUV metrology beamline at BESSYII in Berlin
Dr. Frank Scholze

Third-party funder

Carl Zeiss Foundation (Research Start Program for newly appointed professors at HAW)

Additional information

Staff member Prof. Udo Behn and student Harshil Mistry in front of the high vacuum chamber in the laser laboratory at Schmalkalden University of Applied Sciences, where experiments on EUV generation can be carried out.
Use of a gas puff nozzle specially developed for EUV generation to provide a dense xenon gas in the high vacuum chamber.
CAD model of the developed EUV spectrometer

    👋 Hello!

    I’m here to answer your questions about studying

    HS Schmalkalden Chatbot

    👋 Hello!

    This is a chatbot designed to answer questions from prospective students.
    By using the chatbot, you agree that the data you enter (e.g., questions and answers) will be transmitted to an external service provider and processed there. Data processing is carried out exclusively for the purpose of providing the chatbot function. You can object to data processing at any time. For more information, please see our privacy policy.